Fabrication of fine imaging devices using an external proton microbeam

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 332; pp. 238 - 241
• Main Authors: Sakai, T., Yasuda, R., Iikura, H., Nojima, T., Koka, M., Satoh, T., Ishii, Y., Oshima, A.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.08.2014
• Subjects: Devices; Fluorescent plate; Imaging; Microbeams; Phosphor grains; Pillars; Plates; Polymers; Proton beam writing; Proton beams; Resins; UV/EB curable resin; Fluorescent plate; Phosphor grains; UV/EB curable resin; Proton beam writing
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2014.02.069

We have successfully fabricated novel microscopic imaging devices made from UV/EB curable resin using an external scanning proton microbeam. The devices are micro-structured fluorescent plates that consist of an array of micro-pillars that align periodically. The base material used in the pillars is UV/EB curable resin and each pillar contains phosphor grains. The pattern exposures were performed using a proton beam writing technique. The height of the pillars depends on the range of the proton beam. Optical microscopy and scanning electron microscopy have been used to characterize the samples. The results show that the fabricated fluorescent plates are expected to be compatible with both spatial resolution and detection efficiency.