1 MHz quartz length extension resonator as a probe for scanning near-field acoustic microscopy

The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increas...

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Published inThin solid films Vol. 264; no. 2; pp. 172 - 175
Main Authors Michels, A., Meinen, F., Murdfield, T., Göhde, W., Fischer, U.C., Beckmann, E., Fuchs, H.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier B.V 15.08.1995
Elsevier Science
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Abstract The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution.
AbstractList The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution.
Author Beckmann, E.
Fuchs, H.
Fischer, U.C.
Michels, A.
Meinen, F.
Murdfield, T.
Göhde, W.
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Cites_doi 10.1016/S0007-8506(07)62259-8
10.1007/BF00694423
10.1121/1.1909034
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Issue 2
Keywords Scanning near-field acoustic microscopy
Quartz resonator
Piezoelectric device
Acoustic microscopy
Morphology
Topography
Surface analysis
Experimental study
Resonators
Probes
Language English
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References Ingard, Lamb (BIB9) 1957; 29
Division of ETA SA, Mühlenstr. 14 CH-2540 Grenchen, Switzerland.
Güthner, Fischer, Dransfeld (BIB1) 1989; 48
K. Dransfeld, U.C. Fischer, P. Güthner and K. Heitmann
Nonnenmacher (BIB4) 1990
T. Murdfield, R. Volk, U.C. Fischer and H. Fuchs, in preparation.
1988.
Bartzke, Antrack, Schmidt, Dammann, Schatterny (BIB5) 1993; 8
Goch, Volk (BIB3) 1994
Aβmus, Engelhard (BIB8) 1991; 99
10.1016/0040-6090(95)05853-2_BIB7
Aβmus (10.1016/0040-6090(95)05853-2_BIB8) 1991; 99
Güthner (10.1016/0040-6090(95)05853-2_BIB1) 1989; 48
10.1016/0040-6090(95)05853-2_BIB2
Goch (10.1016/0040-6090(95)05853-2_BIB3) 1994
Ingard (10.1016/0040-6090(95)05853-2_BIB9) 1957; 29
Nonnenmacher (10.1016/0040-6090(95)05853-2_BIB4) 1990
10.1016/0040-6090(95)05853-2_BIB6
Bartzke (10.1016/0040-6090(95)05853-2_BIB5) 1993; 8
References_xml – start-page: 487
  year: 1994
  ident: BIB3
  publication-title: Anals of the CIRP 1994, Manufacturing Technology
  contributor:
    fullname: Volk
– volume: 48
  start-page: 89
  year: 1989
  ident: BIB1
  publication-title: Appl. Phys. B
  contributor:
    fullname: Dransfeld
– volume: 29
  start-page: 743
  year: 1957
  ident: BIB9
  publication-title: J. Acostical Soc. Am.
  contributor:
    fullname: Lamb
– year: 1990
  ident: BIB4
  publication-title: Ph.D. Thesis
  contributor:
    fullname: Nonnenmacher
– volume: 99
  start-page: 421
  year: 1991
  ident: BIB8
  publication-title: Feinwerktech. Meβtech.
  contributor:
    fullname: Engelhard
– volume: 8
  start-page: 669
  year: 1993
  ident: BIB5
  publication-title: Int. J. Optoelectron.
  contributor:
    fullname: Schatterny
– ident: 10.1016/0040-6090(95)05853-2_BIB7
– start-page: 487
  year: 1994
  ident: 10.1016/0040-6090(95)05853-2_BIB3
  publication-title: Anals of the CIRP 1994, Manufacturing Technology
  doi: 10.1016/S0007-8506(07)62259-8
  contributor:
    fullname: Goch
– ident: 10.1016/0040-6090(95)05853-2_BIB6
– volume: 99
  start-page: 421
  issue: 10
  year: 1991
  ident: 10.1016/0040-6090(95)05853-2_BIB8
  publication-title: Feinwerktech. Meβtech.
  contributor:
    fullname: Aβmus
– ident: 10.1016/0040-6090(95)05853-2_BIB2
– year: 1990
  ident: 10.1016/0040-6090(95)05853-2_BIB4
  contributor:
    fullname: Nonnenmacher
– volume: 48
  start-page: 89
  year: 1989
  ident: 10.1016/0040-6090(95)05853-2_BIB1
  publication-title: Appl. Phys. B
  doi: 10.1007/BF00694423
  contributor:
    fullname: Güthner
– volume: 29
  start-page: 743
  issue: 6
  year: 1957
  ident: 10.1016/0040-6090(95)05853-2_BIB9
  publication-title: J. Acostical Soc. Am.
  doi: 10.1121/1.1909034
  contributor:
    fullname: Ingard
– volume: 8
  start-page: 669
  year: 1993
  ident: 10.1016/0040-6090(95)05853-2_BIB5
  publication-title: Int. J. Optoelectron.
  contributor:
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Snippet The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of...
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StartPage 172
SubjectTerms Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Quartz resonator
Scanning near-field acoustic microscopy
Solid surfaces and solid-solid interfaces
Surface structure and topography
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Title 1 MHz quartz length extension resonator as a probe for scanning near-field acoustic microscopy
URI https://dx.doi.org/10.1016/0040-6090(95)05853-2
Volume 264
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