1 MHz quartz length extension resonator as a probe for scanning near-field acoustic microscopy
The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increas...
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Published in | Thin solid films Vol. 264; no. 2; pp. 172 - 175 |
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Main Authors | , , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
15.08.1995
Elsevier Science |
Subjects | |
Online Access | Get full text |
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Summary: | The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(95)05853-2 |