1 MHz quartz length extension resonator as a probe for scanning near-field acoustic microscopy

• Published in: Thin solid films Vol. 264; no. 2; pp. 172 - 175
• Main Authors: Michels, A., Meinen, F., Murdfield, T., Göhde, W., Fischer, U.C., Beckmann, E., Fuchs, H.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 15.08.1995; Elsevier Science
• Subjects: Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Physics; Quartz resonator; Scanning near-field acoustic microscopy; Solid surfaces and solid-solid interfaces; Surface structure and topography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Scanning near-field acoustic microscopy; Quartz resonator; Piezoelectric device; Acoustic microscopy; Morphology; Topography; Surface analysis; Experimental study; Resonators; Probes
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/0040-6090(95)05853-2

The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution.