Physical and numerical verification of discharge calculations

Calculations of radio frequency discharge parameters, and to a lesser extent DC discharge parameters, are apparently highly sensitive to the physical model used. The testing of numerical schemes for error, considering alternative formulations and simple physical models, is carefully considered. With...

Full description

Saved in:
Bibliographic Details
Published inIEEE transactions on plasma science Vol. 21; no. 2; pp. 228 - 238
Main Authors Hitchon, W.N.G., Parker, G.J., Lawler, J.E.
Format Journal Article
LanguageEnglish
Published New York, NY IEEE 01.04.1993
Institute of Electrical and Electronics Engineers
Subjects
661300 - Other Aspects of Physical Science- (1992-)
ACCURACY
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Computational modeling
ELECTRIC DISCHARGES
ELEMENTS
ERRORS
Exact sciences and technology
FLUIDS
GASES
HELIUM
Integral equations
Kinetic theory
KINETICS
NONMETALS
NUMERICAL SOLUTION
Parameter estimation
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
PLASMA
Plasma density
PLASMA SIMULATION
Predictive models
Radio frequency
RARE GASES
SIMULATION
Testing
VERIFICATION
Kinetic model
Particle code
Physical model
Theoretical study
Numerical simulation
Radiofrequency
Plasma characteristic
Online AccessGet full text

Cover

More Information
Summary:Calculations of radio frequency discharge parameters, and to a lesser extent DC discharge parameters, are apparently highly sensitive to the physical model used. The testing of numerical schemes for error, considering alternative formulations and simple physical models, is carefully considered. Within kinetic models a number of options exist, having different capabilities, the implications of which are examined. Particle simulations are discussed, and mesh-based kinetic calculations are considered in detail. An efficient and accurate mesh-based kinetic model which closely replicates the physical processes taking place is presented. Ways to improve its accuracy, which is limited by the resolution of the mesh, and their effects are presented. Cross-checking of various numerical formulations shows that the results for each are essentially the same. Physical reasoning and simple estimates of discharge parameters are used to further substantiate the predictions for a particular discharge, and the processes taking place in an RF discharge in helium are described in detail.< >
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0093-3813
1939-9375
DOI:10.1109/27.219384