Development of laser ionization mass nanoscope (LIMAS)

• Published in: Surface and interface analysis Vol. 44; no. 6; pp. 635 - 640
• Main Authors: Ebata, Shingo, Ishihara, Morio, Uchino, Kiichiro, Itose, Satoru, Matsuya, Miyuki, Kudo, Masato, Bajo, Ken-ichi, Yurimoto, Hisayoshi
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01.06.2012; Wiley
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; gallium focused ion beam; laser post-ionization; Physics; space samples; time-of-flight mass spectrometer; space samples; Liquid state; Gallium; Neutral particle spectrometry; Time-of-flight method; Mass spectroscopy; Ion beams; gallium focused ion beam; Ionization; laser post-ionization; Ion sources; Ultrahigh vacuum; time-of-flight mass spectrometer
• ISSN: 0142-2421; 1096-9918
• DOI: 10.1002/sia.4857

We have developed a new nano‐beam time‐of‐flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40 nm in diameter under a current of 100 pA with an energy of 20 keV. The sputtered particles were post‐ionized under non‐resonance mode by a femtosecond laser. The post‐ionized ions were introduced into a multi‐turn mass spectrometer. A mass resolution of up to 40 000 was achieved. The vacuum of the sample chamber was maintained under an ultrahigh vacuum of 2 × 10−8 Pa. This instrument would be effective for ultrahigh sensitive analysis of nanosized particles such as return samples from asteroids, comets, and planets. Copyright © 2012 John Wiley & Sons, Ltd.