Development of an Efficient and Controllable Nano-porous Copper with Good Wettability and Capillary Performance for Wicks of Vapor Chamber

To meet the heat dissipation requirements of microelectronic devices, it is urgent to develop an efficient method to fabricate a controllable micro/nano structure for the wick in vapor chamber, which is widely investigated for its high thermal conductivity and small size. This work proposed a contro...

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Bibliographic Details
Published inElectronic materials letters Vol. 18; no. 5; pp. 465 - 474
Main Authors Chen, Sizhen, Cai, Han, Li, Yahui, Zhang, Qi, Sun, Yunna, Ding, Guifu
Format Journal Article
LanguageEnglish
Published Seoul The Korean Institute of Metals and Materials 01.09.2022
Springer Nature B.V
대한금속·재료학회
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Summary:To meet the heat dissipation requirements of microelectronic devices, it is urgent to develop an efficient method to fabricate a controllable micro/nano structure for the wick in vapor chamber, which is widely investigated for its high thermal conductivity and small size. This work proposed a controllable fabrication of nano-porous copper (NPC) with high efficiency, which includes electrodeposition and dealloying. A uniform Cu–Zn alloy with single phase was prepared as the precursor for dealloying through electrodeposition. An innovative solution system for dealloying was developed for the fabrication of the bi-continuous NPC, in which the efficiency was improved ten times compared to the conventional acid solution. In addition, the effects of dealloying parameters on the NPC morphology and the process efficiency have also been studied systematically. Based on the above method, both good wettability and capillary performance were achieved by NPC with tunable pore size, which indicates its great application prospects in wicks for high-performance vapor chamber. Graphical Abstract
ISSN:1738-8090
2093-6788
DOI:10.1007/s13391-022-00357-5