Structure and properties of GZO thin films grown on ZnO buffer layers

• Published in: Superlattices and microstructures Vol. 49; no. 2; pp. 158 - 168
• Main Authors: Chu, C.Y., Huang, C.H., Kao, L.M., Chou, C.P., Hsu, C.Y., Chen, C.W., Chen, D.Y.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.02.2011
• Subjects: Analysis of variance; Annealing; Buffer layer; Buffer layers; Deposition; Electrical resistivity; Grey relational analysis; Growth rate; Orthogonal arrays; Taguchi methods; Thin films; Transparent conductive oxide; Zinc oxide; Buffer layer; Grey relational analysis; Growth rate; Transparent conductive oxide
• ISSN: 0749-6036; 1096-3677
• DOI: 10.1016/j.spmi.2010.12.001

Thin gallium-doped zinc oxide (in GZO the Ga 2O 3 contents are approximately 3 wt%) films having different ZnO buffer layers were deposited using radio frequency (rf) magnetron sputtering. The use of a grey-based Taguchi method to determine the processing parameters of ZnO buffer layer deposition has been studied by considering multiple performance characteristics. A Taguchi method with an L 9 orthogonal array, signal-to-noise (S/N) ratio, and analysis of variance (ANOVA) is employed to investigate the performance characteristics in the deposition operations. The effect and optimization of ZnO buffer deposition parameters (rf power, sputtering pressure, thickness, and annealing) on the structure, morphology, electrical resistivity, and optical transmittance of the GZO films are studied. Annealing treatment and reduction in thickness resulted in a decrease in root-mean-square (RMS) surface roughness of the ZnO buffer layer. Using the optimal ZnO buffer layer obtained by the application of the grey-based Taguchi method, the electrical resistivity of GZO films was decreased from 2.94×10 −3 to 9.44×10 −4 Ω cm and the optical transmittance in the visible region was slightly increased from 84.81% to 85.82%.