Cryogenic thermal storage system for discontinuous industrial vacuum processes

Phase Change Materials are proposed for refrigerating systems in discontinuous industrial vacuum processes where temperatures as low as −140 ÷ −100°C are necessary within time-frames representing 10÷20% of total operating time. An application is proposed for cooling systems used in a Physical Vapour...

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Bibliographic Details
Published inEPJ Web of conferences Vol. 33; p. 4006
Main Authors McEvoy, A., Bruzzi, M., Chesi, A., Baldi, A., Tarani, F., Mori, R., Scaringella, M., Carnevale, E.
Format Journal Article
LanguageEnglish
Published EDP Sciences 01.01.2012
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Summary:Phase Change Materials are proposed for refrigerating systems in discontinuous industrial vacuum processes where temperatures as low as −140 ÷ −100°C are necessary within time-frames representing 10÷20% of total operating time. An application is proposed for cooling systems used in a Physical Vapour Deposition (PVD) apparatus. A prototype has been manufactured which couples a cryopump with a reservoir filled with MethylCycloPentane (MCP-C6H12) and a distribution line where nitrogen in the gaseous state is flowing. Preliminary tests show that temperatures of about −120°C are actually achieved within time windows compatible with PVD applications.
Bibliography:istex:4E6B48816689817C2B2A1EA5835203DA3BF79352
other:2012EPJWC..3304006B
publisher-ID:epjconf_e2c2012_04006
ark:/67375/80W-DMPDBWJP-3
ISSN:2100-014X
2100-014X
DOI:10.1051/epjconf/20123304006