Development of MEMS liquid cell to visualize the dynamics of bubbles and droplets at the microscale

I developed a microelectromechanical system (MEMS) liquid cell for the visualization of bubbles and droplets at the microscale using a scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was 80‐nm‐thick S...

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Bibliographic Details
Published inElectronics and communications in Japan Vol. 102; no. 9; pp. 55 - 60
Main Author Ishida, Tadashi
Format Journal Article
LanguageEnglish
Published Hoboken Wiley Subscription Services, Inc 01.09.2019
Subjects
bubble
Bubbles
droplet
Droplets
Electron beams
Electron microscopes
electron transparent membrane
microchannel
Microchannels
Microelectromechanical systems
scanning electron microscope
Scanning electron microscopy
Wettability
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Summary:I developed a microelectromechanical system (MEMS) liquid cell for the visualization of bubbles and droplets at the microscale using a scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was 80‐nm‐thick Si3N4. I tested the wettability of the electron transparent membrane and liquid leakage, and simulated the scattering of an electron beam. The MEMS liquid cell was equipped on the SEM custom‐made holder for in‐liquid specimens. I observed the floating of bubbles in the microchannel and the formation and growth of droplets on the electron transparent membrane at the microscale using an SEM.
Bibliography:10.1541/ieejsmas.139.137
Translated from Volume 139 Number 6, pages 137–142, DOI
Denki Gakkai Ronbunshi E
of
IEEJ Transactions on Sensors and Micromachines
ISSN:1942-9533
1942-9541
DOI:10.1002/ecj.12205