Development of nano and micro SQUIDs based on Al tunnel junctions

• Published in: Journal of physics. Conference series Vol. 568; no. 2; p. 22019
• Main Authors: Ishiguro, Ryosuke, Watanabe, Eiichiro, Sakuma, Daisuke, Shinozaki, Tomoya, Tsuchiya, Shogo, Nago, Yusuke, Osato, Hirotaka, Tsuya, Daiju, Kashiwaya, Hiromi, Kashiwaya, Satoshi, Nomura, Shintaro, Takayanagi, Hideaki, Maeno, Yoshiteru
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 08.12.2014
• Subjects: Aluminum; Inductively coupled plasma; Integrated circuits; Mass production; Mesoscopic superconductors; Niobium; Physics; Reactive ion etching; Strontium ruthenium oxide; Superconducting quantum interference devices; Superconductivity; Tunnel junctions
• ISSN: 1742-6588; 1742-6596
• DOI: 10.1088/1742-6596/568/2/022019

Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and the magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using the Niemeyer-Dolan technique and the inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report the fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3].