An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope

A dual-axis friction force microscope (FFM) probe with an electrostatic actuator has been developed. This actuator can modulate the sliding speed of the probe. A micro-drive part and the probe part were separately fabricated by anisotropic chemical etching and then combined using micro concave–conve...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 175; pp. 94 - 100
Main Authors Amakawa, Hiroaki, Fukuzawa, Kenji, Shikida, Mitsuhiro, Tsuji, Hiroaki, Zhang, Hedong, Itoh, Shintaro
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.03.2012
Subjects
Actuators
Electrodes
Electrostatic actuator
Electrostatics
Friction
Friction force microscope
Liquids
Micromachine
Microscopes
Microtribology
Rheological properties
Space probes
Micromachine
Friction force microscope
Microtribology
Electrostatic actuator
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Summary:A dual-axis friction force microscope (FFM) probe with an electrostatic actuator has been developed. This actuator can modulate the sliding speed of the probe. A micro-drive part and the probe part were separately fabricated by anisotropic chemical etching and then combined using micro concave–convex alignment structures. This resulted in 10-μm-order gaps between electrodes of the probe and drive parts and could provide a sufficient electrostatic force. The laterally vibrated probe demonstrated the evaluation of the local rheological properties of the 1.9-nm-thick liquid lubricant film patterned in a 10-μm wide line and space pattern. A dual-axis micro-mechanical probe with this electrostatic actuator can be used to clarify local tribological and rheological properties.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2011.12.037