Liquid reagent CVD of carbon. I. Processing and microstructure

The processing and microstructure of carbon coatings deposited using liquid reagent CVD were studied. High density pyrolytic carbon coatings were successfully deposited on graphite and molybdenum substrates from benzene and cyclohexane precursors. Very high deposition rates were obtained. Examinatio...

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Bibliographic Details
Published inCarbon (New York) Vol. 42; no. 10; pp. 1895 - 1900
Main Authors Jiang, M.X, Lackey, W.J, More, K
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 2004
Elsevier Science
Subjects
A. Pyrolytic carbon
B. Chemical vapor deposition
C. Transmission electron microscopy, X-ray diffraction
Cross-disciplinary physics: materials science; rheology
D. Microstructure
Exact sciences and technology
Fullerenes and related materials; diamonds, graphite
Materials science
Physics
Specific materials
B. Chemical vapor deposition
D. Microstructure
A. Pyrolytic carbon
C. Transmission electron microscopy, X-ray diffraction
CVD
Liquids
Microstructure
Carbon
Reagents
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Summary:The processing and microstructure of carbon coatings deposited using liquid reagent CVD were studied. High density pyrolytic carbon coatings were successfully deposited on graphite and molybdenum substrates from benzene and cyclohexane precursors. Very high deposition rates were obtained. Examination via transmission electron microscopy showed that the deposits were of the desired turbostratic nodular structure with low texture.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0008-6223
1873-3891
DOI:10.1016/j.carbon.2004.01.072