Development of a straightness measuring system and compensation technique using multiple corner cubes for precision stages

• Published in: Proceedings of the Institution of Mechanical Engineers. Part B, Journal of engineering manufacture Vol. 224; no. 3; pp. 483 - 492
• Main Authors: Liu, C-H, Jywe, W-Y, Jeng, Y-R, Huang, H-L, Hsu, T-H, Wang, M-S, Deng, S-Y
• Format: Journal Article
• Language: English
• Published: London, England SAGE Publications 01.03.2010; Sage Publications; SAGE PUBLICATIONS, INC
• Subjects: Applied sciences; Compensation; Control systems; Cubes; Dynamical systems; Dynamics; Error analysis; Errors; Exact sciences and technology; Industrial metrology. Testing; Low cost; Materials science; Mechanical engineering; Mechanical engineering. Machine design; On-line systems; Optimization; Straightness; straightness errors; online measuring; dynamic compensation; Costs; Position control; Straightness; Dimensional control; Error correction; Experimental study; Measurement error
• ISSN: 0954-4054; 2041-2975
• DOI: 10.1243/09544054JEM1620

Abstract At present, the accuracy of precision manufacture is most affected by straightness errors, so the measurement and compensation of these errors are very important. In the current paper, three measurement systems for straightness are presented; they are characterized by simple set-up, online measuring, low cost, and sub-micrometre accuracy achieving 0.2 μm. Experimental results show that these three measurement systems can be applied to implement a compensation system which comprises one among them, an Elmo controller, and a dSPACE controller, and accomplish static compensation and dynamic compensation in the dual linear-axis stage. The accuracies of the static and dynamic compensation achieve ± 1 μm and ± 2.5 μm, respectively.