Fabrication and characterization of Au/SiO2 nanocomposite films grown by radio-frequency cosputtering

• Published in: Current applied physics Vol. 8; no. 6; pp. 761 - 765
• Main Authors: Jung, Kyung-Han, Yoon, Jong-Won, Koshizaki, Naoto, Kwon, Young-Soo
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.10.2008; 한국물리학회
• Subjects: Atomic ratio; Au/SiO2; Cosputtering; Nanocomposite film; 물리학; 95.30.Wi; Cosputtering; 79.60.Jv; Nanocomposite film; 78.67.Bf; Au/SiO2; Atomic ratio
• ISSN: 1567-1739; 1878-1675
• DOI: 10.1016/j.cap.2007.04.054

Au/SiO2 nanocomposite films were prepared on Si wafers by cosputtering of SiO2 and gold wires. Au/Si atomic ratios in Au/SiO2 nanocomposite films were varied from 0.53 to 0.92 by controlling the length of gold wire to study the evolution of the crystallization of gold, the size of Au/SiO2 nanocomposite particles, and the optical properties of as-deposited Au/SiO2 nanocomposite films. An X-ray photoelectron spectroscopy reveals that Au exists as a metallic phase in the bulk of SiO2 matrix. Dome-shaped Au/SiO2 nanocomposite particles and both Au (111) and (200) planes were observed in a field-emission scanning electron microscopy and X-ray diffraction studies respectively. With an ultraviolet-visible, absorption peaks of Au/SiO2 nanocomposite films were observed at 525nm.