Development of the nano-probe system based on the laser-trapping technique

A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm) 3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system wit...

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Bibliographic Details
Published inCIRP annals Vol. 57; no. 1; pp. 493 - 496
Main Authors Michihata, M., Takaya, Y., Hayashi, T.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Oxford Elsevier Ltd 2008
Elsevier
Subjects
Applied sciences
Coordinate measuring machine (CMM)
Exact sciences and technology
Industrial metrology. Testing
Mechanical engineering. Machine design
Microstructure
Probe
Probe
Microstructure
Coordinate measuring machine (CMM)
Nanometer scale
Repeatability
Trapping
Uncertain system
Coordinate measuring machine
Laser
Capability maturity model
Flatness
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Summary:A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm) 3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and describes the performance of the probe via an assessment of the flatness and microsphere. It is observed that the laser-trapping probe can sense three-dimensional objects with a repeatability of 32 nm. Using the nano-CMM, the measurement uncertainty is estimated to be 335 nm ( k = 2).
ISSN:0007-8506
DOI:10.1016/j.cirp.2008.03.016