Efficient perfectly vertical fiber-to-chip grating coupler for silicon horizontal multiple slot waveguides

Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed wit...

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Bibliographic Details
Published inOptics express Vol. 21; no. 9; pp. 10886 - 10896
Main Authors Covey, John, Chen, Ray T
Format Journal Article
LanguageEnglish
Published United States 06.05.2013
Subjects
Energy Transfer
Equipment Design
Equipment Failure Analysis
Nanoparticles - chemistry
Nanotechnology - instrumentation
Refractometry - instrumentation
Silicon Dioxide - chemistry
Surface Plasmon Resonance - instrumentation
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Summary:Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed without starting from first-principle design. Theoretical coupling efficiency was 68% and was re-designed to 63% after accommodating all sources of fabrication error. To our knowledge, this is the first implementation of a purely polysilicon and silicon nanocrystalline oxide slot waveguide platform.
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ISSN:1094-4087
1094-4087
DOI:10.1364/oe.21.010886