CVD diamond films for radiation detection
Diamond films produced by microwave plasma enhanced chemical vapor deposition (CVD) technique have been used to fabricate radiation detectors. The polycrystalline diamond films have a measured resistivity of 10/sup 12/ /spl Omega/.cm, a carrier mobility of 280 cm/sup 2//V.s and a carrier lifetime of...
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Published in | IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 41; no. 4; pp. 927 - 932 |
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Main Authors | , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
New York, NY
IEEE
01.08.1994
Institute of Electrical and Electronics Engineers |
Subjects | |
Online Access | Get full text |
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Summary: | Diamond films produced by microwave plasma enhanced chemical vapor deposition (CVD) technique have been used to fabricate radiation detectors. The polycrystalline diamond films have a measured resistivity of 10/sup 12/ /spl Omega/.cm, a carrier mobility of 280 cm/sup 2//V.s and a carrier lifetime of about 530 ps. The detector response to laser pulses (/spl lambda/=355, 532 and 1064 nm), X-ray flux (15-50 keV) and alpha particles (/sup 241/Am, 5.49 MeV) has been investigated. The response speed of the detector is in the 100 ps range. A sensitivity of about 3/spl times/10/sup -10/A/V.(Gy/s) was measured under a 50 keV X-ray flux. The detector current response to X-ray flux is almost linear. It is also shown that CVD diamond detectors can be used for alpha particle counting.< > |
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Bibliography: | SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 None CONF-931051-- |
ISSN: | 0018-9499 1558-1578 |
DOI: | 10.1109/23.322833 |