Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control

• Published in: MATEC Web of Conferences Vol. 63; p. 5030
• Main Authors: He, Chun-Hua, Huang, Qin-Wen, Zhao, Qian-Cheng, Yang, Zhen-Chuan, Zhang, Da-Cheng, Yan, Gui-Zhen
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Les Ulis EDP Sciences 01.01.2016
• Subjects: ascending frequency drive; Control methods; Control systems; electrical coupling suppressing; force rebalance control; Gyroscopes; MEMS gyroscope; mode-matching; Random walk; Stability analysis
• ISSN: 2261-236X; 2274-7214; 2261-236X
• DOI: 10.1051/matecconf/20166305030

This paper has proposed a novel force rebalance control method for a MEMS gyroscope using ascending frequency drive and generalized PI control. Theoretical analyses of ascending frequency drive and force rebalance control methods are illustrated in detail. Experimental results demonstrate that the electrical anti-resonant peaks are located at the frequency responses in the RFD system, which seriously deteriorates the original response characteristics. However, they are eliminated in the AFD system, and the electrical coupling signal is also suppressed. Besides, as for the force rebalance control system, the phase margins approximate to 60deg, gain margins are larger than 13dB, and sensitivity margins are smaller than 3.2dB, which validates the control system is stable and robust. The bandwidth of the force rebalance control system is measured to be about 103.2Hz, which accords with the simulation result. The bias instability and angle random walk are evaluated to be 1.65deg/h and 0.06deg/√h, respectively, which achieves the tactical level.