Anchor-free NEMS non-volatile memory cell for harsh environment data storage

• Published in: Journal of micromechanics and microengineering Vol. 24; no. 11; pp. 115007 - 115013
• Main Authors: Singh, Pushpapraj, Chua, Geng Li, Liang, Ying Shun, Jayaraman, Karthik Gopal, Do, Anh Tuan, Kim, Tony Tae-Hyoung
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.11.2014; Institute of Physics
• Subjects: Adhesion; anchor-free; Contact; Data storage; electrostatics; Exact sciences and technology; Footprints; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; Memory (computers); Memory devices; mems; Micromechanical devices and systems; Micromechanics; molecular force; Nanoelectromechanical systems; non-volatile memory; Physics; Stiction; Van der Waals forces; Data storage; Nanoelectromechanical device; High temperature; Contact surface; CV characteristic; Adhesive strength; Non volatile memory; IV characteristic; Smooth surface; Electrostatic actuators; Electrostatic force
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/24/11/115007

This work demonstrates a novel anchor-free nano-electromechanical (NEMS) based non-volatile memory cell, suitable for high temperature (T ≤ 300 °C) and radiation prone harsh environment applications. The anchor-free circular metal beam is actuated by electrostatic force and is held in one of the bi-stable memory states by adhesion force between two smooth metal surfaces in contact. Smooth metal layers form strong van der Waals stiction between two surfaces in contact and memory detection (Logic-'1' / Logic-'0') is obtained by detecting the conductance between two fixed contacts. This anchor-free design offers highest density (9F2 footprint) compared to other mechanical memory devices reported to date.