CHARACTERISTICS OF THREE-DIMENSIONAL FLOW, HEAT, AND MASS TRANSFER IN A CHEMICAL VAPOR DEPOSITION REACTOR
The three-dimensional flow, heat, and mass transfer characteristics in a horizontal chemical vapor deposition (CVD) reactor with a tilted susceptor are analyzed numerically. As the physical domain for the CVD reactor has an irregular region, the Cartesian coordinates are transformed into a general c...
Saved in:
Published in | Numerical heat transfer. Part A, Applications Vol. 37; no. 4; pp. 407 - 423 |
---|---|
Main Author | |
Format | Journal Article |
Language | English |
Published |
London
Informa UK Ltd
01.03.2000
Taylor & Francis |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The three-dimensional flow, heat, and mass transfer characteristics in a horizontal chemical vapor deposition (CVD) reactor with a tilted susceptor are analyzed numerically. As the physical domain for the CVD reactor has an irregular region, the Cartesian coordinates are transformed into a general curvilinear coordinate system. For calculating the governing equations, the finite volume method (FVM) is adopted and the SIMPLE algorithm is extended and modified to employ the curvilinear system. The effects of flow rate and tilted angle of the susceptor on the transport phenomena (i.e., heat transfer rate, uniformity and growth rate of reactant gas, etc.) at the susceptor are investigated. The results show that the existence of return flows leads locally to improvement of the heat transfer, but it is not good for the uniformity of the deposition. As the tilted angle of the susceptor is increased (from 0
o
to 9
o
), the amount of heat transfer and growth rate in the main flow direction are improved irrespective of the Reynolds number. The growth rate and uniformity are less sensitive to the inclined angle of the susceptor than that of the Reynolds number. |
---|---|
AbstractList | The three-dimensional flow, heat, and mass transfer characteristics in a horizontal chemical vapor deposition (CVD) reactor with a tilted susceptor are analyzed numerically. As the physical domain for the CVD reactor has an irregular region, the Cartesian coordinates are transformed into a general curvilinear coordinate system. For calculating the governing equations, the finite volume method (FVM) is adopted and the SIMPLE algorithm is extended and modified to employ the curvilinear system. The effects of flow rate and tilted angle of the susceptor on the transport phenomena (i.e., heat transfer rate, uniformity and growth rate of reactant gas, etc.) at the susceptor are investigated. The results show that the existence of return flows leads locally to improvement of the heat transfer, but it is not good for the uniformity of the deposition. As the tilted angle of the susceptor is increased (from 0
o
to 9
o
), the amount of heat transfer and growth rate in the main flow direction are improved irrespective of the Reynolds number. The growth rate and uniformity are less sensitive to the inclined angle of the susceptor than that of the Reynolds number. The three-dimensional flow, heat, and mass transfer characteristics in a horizontal chemical vapor deposition (CVD) reactor with a tilted susceptor are analyzed numerically. As the physical domain for the CVD reactor has an irregular region, the Cartesian coordinates are transformed into a general curvilinear coordinate system. For calculating the governing equations, the finite volume method (FVM) is adopted and the SIMPLE algorithm is extended and modified to employ the curvilinear system. The effects of flow rate and tilted angle of the susceptor on the transport phenomena (i.e., heat transfer rate, uniformity and growth rate of reactant gas, etc.) at the susceptor are investigated. The results show that the existence of return flows leads locally to improvement of the heat transfer, but it is not good for the uniformity of the deposition. As the tilted angle of the susceptor is increased (from 0 to 9{degree}), the amount of heat transfer and growth rate in the main flow direction are improved irrespective of the Reynolds number. The growth rate and uniformity are less sensitive to the inclined angle of the susceptor than that of the Reynolds number. |
Author | Pak, Kyoung-Woo Park, Hi-Yong |
Author_xml | – sequence: 1 givenname: Kyoung-Woo Park, Hi-Yong surname: Pak fullname: Pak, Kyoung-Woo Park, Hi-Yong |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1304880$$DView record in Pascal Francis https://www.osti.gov/biblio/20020812$$D View this record in Osti.gov |
BookMark | eNqFkE1L5EAQhptFYf0677VhPRqt_kp6vDWZHhOYSSSJu8eQ6XTYLGMi6YD6720ZRRDEunRBPc9LdR2jg2EcLEK_CFwSkHBFgEMUSQAacSrYD3REBCUBhIwf-N5PAz-mP9Gxc__BF6WLI9THiSpUXOkiLas0LnG-wlVSaB0s043OyjTP1Bqv1vnfC5xoVV1glS3xRpUlrgqVlStd4DTDCseJ3qSxZ_-o27zAS32bl2nldVxon58Xp-iwa3bOnr29J-hupas4Cdb5zasYGLZgcyBbabiwYivDbSs7BlEjoOPGSMJCIS0VW7ONbNcuQsptCIYsZGiAEC460VLOTtDvfe7o5r52pp-t-WfGYbBmrqn_NkhCPXW1p8w0OjfZrn6Y-vtmeq4J1K_3rD_d0xvne-OhcabZdVMzmN59aAy4lOAxscf6oRun--ZxnHZtPTfPu3F6dz5F1_PT7L3rbz321W4vQMaP9A |
CODEN | NHAAES |
CitedBy_id | crossref_primary_10_1016_j_jcrysgro_2004_09_097 crossref_primary_10_1016_S1290_0729_02_01374_1 crossref_primary_10_1080_10407780500436881 crossref_primary_10_1016_j_jcrysgro_2007_10_016 crossref_primary_10_1016_S0017_9310_02_00027_3 crossref_primary_10_1016_S0017_9310_01_00229_0 crossref_primary_10_1016_j_jcrysgro_2006_05_049 crossref_primary_10_1016_S0142_727X_03_00020_1 crossref_primary_10_1016_S1004_9541_09_60169_5 crossref_primary_10_1016_S0022_0248_03_01256_9 crossref_primary_10_1016_j_jcrysgro_2008_03_007 |
ContentType | Journal Article |
Copyright | Copyright Taylor & Francis Group, LLC 2000 2000 INIST-CNRS |
Copyright_xml | – notice: Copyright Taylor & Francis Group, LLC 2000 – notice: 2000 INIST-CNRS |
CorporateAuthor | Hanyang Univ., Seoul (KR) |
CorporateAuthor_xml | – name: Hanyang Univ., Seoul (KR) |
DBID | IQODW AAYXX CITATION OTOTI |
DOI | 10.1080/104077800274253 |
DatabaseName | Pascal-Francis CrossRef OSTI.GOV |
DatabaseTitle | CrossRef |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering Physics |
EISSN | 1521-0634 |
EndPage | 423 |
ExternalDocumentID | 20020812 10_1080_104077800274253 1304880 10145258 |
Genre | Original Articles |
GroupedDBID | -~X .7F .QJ 0BK 0R~ 123 1TA 29N 30N 4.4 5VS AAAVI AAENE AAJMT AALDU AAMIU AAPUL AAQRR ABBKH ABCCY ABDBF ABEFU ABFIM ABHAV ABJVF ABLIJ ABPEM ABPTK ABQHQ ABTAI ABXUL ACGEJ ACGFS ACGOD ACIWK ACTIO ACTTO ADCVX ADGTB ADXPE AEGYZ AEISY AEOZL AEPSL AEYOC AFKVX AFOLD AFWLO AGDLA AGMYJ AGVKY AGWUF AHDLD AIJEM AIRXU AJWEG AKBVH AKOOK ALMA_UNASSIGNED_HOLDINGS ALQZU ALRRR AQRUH AVBZW AWYRJ BLEHA BWMZZ CAG CCCUG CE4 COF CYRSC DAOYK DGEBU DKSSO EAP EBS EJD EMK EPL EST ESX E~A E~B FUNRP FVPDL GEVLZ GTTXZ HZ~ H~P I-F J.P KYCEM M4Z NA5 NUSFT NX~ O9- OPCYK P2P PQEST PQQKQ RIG RNANH ROSJB RTWRZ S-T SNACF TAJZE TEN TFL TFT TFW TNC TTHFI TUS TWF UT5 UU3 V1K ZGOLN ~02 ~S~ 07I 4B5 8W4 ABFLS ABXYU ADXEU AEHZU AEZBV AFION AGBLW AGRBW ALXIB BGSSV C0- C5H COQAR DEXXA FETWF H13 HF~ IFELN IQODW L8C LJTGL TAP UB6 UMP AAYXX ABPAQ ADUMR AKHJE AKMBP CITATION TBQAZ TUROJ OTOTI |
ID | FETCH-LOGICAL-c393t-8d8c45e5b86bd8f307a50f4cc813658e25bcb7efd9624e60c1986c01145f5d243 |
ISSN | 1040-7782 |
IngestDate | Fri May 19 00:34:17 EDT 2023 Thu Sep 12 19:19:33 EDT 2024 Fri Nov 25 01:04:35 EST 2022 Tue Jun 13 19:26:51 EDT 2023 Mon May 13 12:10:30 EDT 2019 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 4 |
Keywords | CVD Flow(fluid) Theoretical study Hydrodynamics Numerical method Kinetics Chemical reactors Heat transfer Mass transfer |
Language | English |
License | CC BY 4.0 |
LinkModel | OpenURL |
MergedId | FETCHMERGED-LOGICAL-c393t-8d8c45e5b86bd8f307a50f4cc813658e25bcb7efd9624e60c1986c01145f5d243 |
Notes | NONE |
PageCount | 17 |
ParticipantIDs | informaworld_taylorfrancis_310_1080_104077800274253 crossref_primary_10_1080_104077800274253 osti_scitechconnect_20020812 pascalfrancis_primary_1304880 |
PublicationCentury | 2000 |
PublicationDate | 2000-03-01 |
PublicationDateYYYYMMDD | 2000-03-01 |
PublicationDate_xml | – month: 03 year: 2000 text: 2000-03-01 day: 01 |
PublicationDecade | 2000 |
PublicationPlace | London |
PublicationPlace_xml | – name: London – name: United States |
PublicationTitle | Numerical heat transfer. Part A, Applications |
PublicationYear | 2000 |
Publisher | Informa UK Ltd Taylor & Francis |
Publisher_xml | – name: Informa UK Ltd – name: Taylor & Francis |
SSID | ssj0000229 |
Score | 1.6418374 |
Snippet | The three-dimensional flow, heat, and mass transfer characteristics in a horizontal chemical vapor deposition (CVD) reactor with a tilted susceptor are... |
SourceID | osti crossref pascalfrancis informaworld |
SourceType | Open Access Repository Aggregation Database Index Database Enrichment Source Publisher |
StartPage | 407 |
SubjectTerms | CHEMICAL REACTORS CHEMICAL VAPOR DEPOSITION Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science; rheology ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION Exact sciences and technology FLUID FLOW HEAT TRANSFER MASS TRANSFER Materials science Methods of deposition of films and coatings; film growth and epitaxy NUMERICAL ANALYSIS Physics Theory and models of film growth THREE-DIMENSIONAL CALCULATIONS |
Title | CHARACTERISTICS OF THREE-DIMENSIONAL FLOW, HEAT, AND MASS TRANSFER IN A CHEMICAL VAPOR DEPOSITION REACTOR |
URI | https://www.tandfonline.com/doi/abs/10.1080/104077800274253 https://www.osti.gov/biblio/20020812 |
Volume | 37 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9NAEF6FIiQ4ICggAi3aAwek1MavtdfHqAJFIHJAqSgny_uwVKkkKHWqijv_m5nd9TO8L1a0SbzOzpeZsfebbwh5yUSWlVVeejLLKy-BGOhh3uypWAkhudKxEXv-sEwXZ8m7c3Y-mXzvsZZ2tfDlt5_WlfyPVWEM7IpVsv9g2fakMACvwb5wBAvD8a9sfDpSWzb7_VutPYWa_VZvY1Zd2u0b9LoNV_MLpMzYHQJyVo18dCyRbJQDrktIyZEh6-hcM0grpdUkbtPY5c5u9Jg6yro9kw8J6baezY3D6e2Mt_53_vG98Sy-96kbM0ML3_s8eAIRdBQsg5nVXjOQnj81hMXM9hfytfOxEZKt3DNM54St8osDW9LzqIltiuuCc2KLk_f8viVK4mwwmd1_thrEQ4XtUeRr-YgQyNGR3SK3oyxnyAyNg2UX0CPT7K79LY1CFA9ej2YcJDcD6VuI-BuAAlJvyyswT2VXqpfLrB6Q--4mhM4toh6SiV4fkns9acpDcsdQg-XVI3IxQhndVHQPZRRRdkIRDScUEEYRYbTBBb1Y05I2CKMGYbRDGHUIe0zO3r5ZnS4816DDk3Ee1x5XXCZMM8FToXgF4aJkQZVIyZE8yXXEhBSZrlSeRolOAxnmPJV4C84qpqIkfkIO1pu1fkpoLEKpKi7KQMN4mJe5ljnjJQuzUuUqnpJXzcoWX60OSxE6eduREabE7698URt8ugUff7iob-opiX_zhfiX0xyhRQvIVFFuWSIvTdbY1jWCNDuakuOBpburtlh79of3n5O73X_tiBzU250-hvy3Fi8MOn8AQM2tOg |
link.rule.ids | 230,315,786,790,891,27955,27956,60239,61028 |
linkProvider | Taylor & Francis |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Nj5QwFH9Z1xj14MeqcXRXe_DgYZkMlEKbeCEzENAZ2ACrezGEfpAYk1njsonxr7ctQ3ZmjB72REKgLe3r-yi_93sA7wgPw7ZjrSNC1jm-toGO8ZsdiSXngkqFLdnzKg_Sc__jBbk4gA9jLoyBVZoYuhuIIqyuNpvbHEaPkDh91WFISIf_jATfgbuBydE0CRyz_EYPe7ZGmWsxc9oQjsQ-fzewY5N2GEu1or7UW80gJtsrPWndUO1iywQlj-HrOPgBefJ9et3zqfi9x-t42697Ao82vimKBmF6CgdqfQQPtxgLj-CeRYyKq2fwbZ5GZTTX3nBW1dm8QkWC6rSMY2eRreK8shy7KFkWX05RGkf1KYryBVpFVYXqMsqrJC5RlqMIjaQM6HN0VpRoEZ8VVWYOzlAZ6_aL8jmcJ3E9T51N3QZHYIZ7h0oqfKIIpwGXtNNapCWzzheCGkwdVR7hgoeqkyzwfBXMhMtoIExkRjoiPR-_gMP15Vq9BIS5K2RHeTtT-r7LWqYEI7QlbthKJvEE3o8r1_wY6Dkad8N6ujePE5hur2zT2xORzYLuP9z0v_oJ4P-8gP_ZzbGRmEY7MIaFVxi4kuhNtU9Pe1_eBE52JOlm1Njq0le36vQt3E_r1bJZZvmn1_BgoAswOLljOOx_XqsT7Tj1_I3dH38AoVcDsQ |
linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Nb5swFH_qOm1aD_voNjVru_mwww4lChiDUU8oAcHWQAR066ESwl_SVCmtWipN--tnQ1CTTNuhJyQEtvF7fh_m598D-EyY7zcqaCzuB8pytQ-0TNxsCSwY41RI3JE9zzMvOXe_XpCLHTgdzsIYWKXJoVVPFNHZarO4b4QaEHH6qrMQn_a_GQl-Ak894ybN-Y1J9mCGna5Emd1B5rQfHHh9_m5gwyVtEJZqO32tV5oBTDZ3es5UX-xizQPFr-ByGHsPPLka37dszH9v0To-8uNew8tVZIrCXpXewI5c7sPeGl_hPjzr8KL87i38nCZhEU51LJyWVTotUR6jKimiyJql8ygrO4ZdFJ_lP05QEoXVCQqzGZqHZYmqIszKOCpQmqEQDZQM6Hu4yAs0ixZ5mZptM1REuv28eAfncVRNE2tVtcHiOMCtRQXlLpGEUY8JqrQNachEuZxTg6ij0iGMM18qEXiOK70JtwPqcZOXEUWE4-L3sLu8XsoDQJjZXCjKmonU9-2gCSQPCG2I7TciEHgEXwbB1Tc9OUdtrzhPt-ZxBON1wdZttx-ykuf2w3X7qx0B_s8L-J_dHBmFqXX4Yjh4uQEr8dbU-nR07OWM4HhDkR5GjTtL-uFRnX6C54tZXJ-l2bdDeNFzBRiQ3BHstrf38lhHTS372K2OP2o-Al4 |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Characteristics+of+three-dimensional+flow%2C+heat%2C+and+mass+transfer+in+a+chemical+vapor+deposition+reactor&rft.jtitle=Numerical+heat+transfer.+Part+A%2C+Applications&rft.au=PARK%2C+K.-W&rft.au=PAK%2C+H.-Y&rft.date=2000-03-01&rft.pub=Taylor+%26+Francis&rft.issn=1040-7782&rft.eissn=1521-0634&rft.volume=37&rft.issue=4&rft.spage=407&rft.epage=423&rft_id=info:doi/10.1080%2F104077800274253&rft.externalDBID=n%2Fa&rft.externalDocID=1304880 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1040-7782&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1040-7782&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1040-7782&client=summon |