Vortex Anemometer Using MEMS Cantilever Sensor

• Published in: Journal of microelectromechanical systems Vol. 19; no. 6; pp. 1485 - 1489
• Main Authors: Zylka, Paweł, Modrzynski, Paweł, Janus, Paweł
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.12.2010; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Accuracy; Applied sciences; Bluff body; Composites; Devices; Exact sciences and technology; flow sensor; Fluid flow; Fluid flow measurement; Forms of application and semi-finished materials; frequency; Frequency measurement; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; laminar; Mechanical instruments, equipment and techniques; Microelectromechanical systems; Micromechanical devices; Micromechanical devices and systems; Obstacles; Physics; Polymer industry, paints, wood; Sensors; Signal processing; Technology of polymers; turbulent; vortex; Vortex flowmeters; Vortices; vortex; Flow measurement; Epoxy resin; Digital processing; Cantilever beam; Glass fibers; frequency; flow sensor; Silicon; Microelectromechanical device; Electrical signal; Bluff body; Displacement sensor; Measurement sensor; Frequency domain method; Composite materials; turbulent; Laminar flow; Vortices; laminar; Signal processing; Flowmeters; Hybrid systems; Vortex flow; Anemometers
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2010.2079916

This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linear measurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.