Dependence of optical properties of vanadium oxide films on crystallization and temperature

• Published in: Thin solid films Vol. 520; no. 6; pp. 2368 - 2371
• Main Authors: Kang, M.I., Kim, I.K., Oh, E.J., Kim, S.W., Ryu, J.W., Park, H.Y.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 2012; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Electron states; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Metal-insulator transitions and other electronic transitions; Metal-to-insulator transition; Optical constants; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical instruments, equipment and techniques; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Optical properties of specific thin films; Physics; Polarimeters and ellipsometers; Spectroscopic ellipsometry; Sputtering; Vanadium dioxide; Vanadium pentoxide; Metal-to-insulator transition; Vanadium pentoxide; Spectroscopic ellipsometry; Vanadium dioxide; Optical constants; Sputtering; Temperature dependence; Transition temperature; Metal-insulator transition; Refractive index; Vanadium; Transmittance; Thin films; Temperature effects; Optical properties; Vanadium oxide; Radiofrequency sputtering; Crystal structure
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2011.11.028

The optical properties of V 2O 5 and VO 2 films prepared by a radio frequency sputtering were investigated using spectroscopic ellipsometry and measurement of transmittance. It was confirmed that the spectra of the complex refractive index of the V 2O 5 films are greatly affected by variations in crystalline structure. The spectra of the complex refractive index of the VO 2 film showed remarkable change near transition temperature. This result indicates that the metal–insulator transition (MIT) in the VO 2 film occurs around 68 °C, and the MIT is confirmed by measurement of the transmittance with temperature.