Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain

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Bibliographic Details
Published inSemiconductor science and technology Vol. 22; no. 8; pp. 970 - 979
Main Authors Xu, Lu, Lowney, Donnacha, McNally, Patrick J, Borowiec, A, Lankinen, A, Tuomi, T O, Danilewsky, A N
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.08.2007
Institute of Physics
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
Raman spectra
Lattice distortion
Nondestructive analysis
Surface morphology
Micromachining
Tensile stress
Indium phosphides
Recrystallization
Shear stress
Laser beam machining
Heat affected zone
Synchrotron radiation
X-ray topography
III-V semiconductors
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/22/8/024