Initial resolution measurements of miniaturized electrostatic lenses for LVSEM

• Published in: Ultramicroscopy Vol. 93; no. 3; pp. 339 - 345
• Main Authors: Lutsch, R.Y, Plies, E
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.12.2002; Elsevier Science
• Subjects: Beam optics; Design of lenses; Electromagnetism; electron and ion optics; Electron optics; Electron, positron and ion microscopes, electron diffractometers and related techniques; Electrostatic lenses; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Low-voltage scanning electron microscopy; Physics; SEM; Electron optics; SEM; Low-voltage scanning electron microscopy; 41.85; Design of lenses; Electrostatic lenses; Scanning electron microscopy; Electron beams; Transmission electron microscopy; Theoretical study; Experimental device; Magnetic lenses; Experimental study
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/S0304-3991(02)00289-9

Theoretical and experimental investigations on miniaturized electrostatic lenses for high-resolution low-voltage scanning electron microscopical applications are presented. The electron optical column consists of a Schottky emitter including the extraction anode and a miniaturized three electrode lens consisting of conventional (electron microscopical) platinum apertures. The lens has been optimized with respect to resolution and a value of about 5 nm at a working distance of 1 mm and a beam energy of 1 keV is predicted by simulation. Details on the resolution measurements are presented. An initial experimental value amounts to 31 nm . Specific problems encountered during building and alignment of the lens and measuring the resolution are discussed as well.