Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering
Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are...
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Published in | Quantum electronics (Woodbury, N.Y.) Vol. 43; no. 9; pp. 791 - 794 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
United States
Turpion Ltd and the Russian Academy of Sciences
01.01.2013
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Subjects | |
Online Access | Get full text |
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Summary: | Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are described. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1063-7818 1468-4799 |
DOI: | 10.1070/QE2013v043n09ABEH015218 |