Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering

Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are...

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Bibliographic Details
Published inQuantum electronics (Woodbury, N.Y.) Vol. 43; no. 9; pp. 791 - 794
Main Authors Abramov, N.F., Volpyan, O.D., Obod, Yu.A., Dronskii, R.V.
Format Journal Article
LanguageEnglish
Published United States Turpion Ltd and the Russian Academy of Sciences 01.01.2013
Subjects
Automatic control
COATINGS
CONTROL EQUIPMENT
Devices
DIELECTRIC MATERIALS
FABRICATION
LASERS
magnetron deposition
Magnetron sputtering
MAGNETRONS
MATERIALS SCIENCE
nanogradient coatings
Nanostructure
Optical coatings
Quantum electronics
SPUTTERING
thin film elements
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Summary:Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are described.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1063-7818
1468-4799
DOI:10.1070/QE2013v043n09ABEH015218