Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

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Bibliographic Details
Published inEPJ Web of Conferences Vol. 149; p. 2013
Main Authors Yurov, V.Yu, Bushuev, E.V., Bolshakov, A.P., Antonova, I.A., Ralchenko, V.G., Konov, V.I.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Les Ulis EDP Sciences 01.01.2017
Subjects
Diamonds
Optical emission spectroscopy
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ISSN:2100-014X
2101-6275
2100-014X
DOI:10.1051/epjconf/201714902013