Ultra-thin glass sheet integrated transparent diaphragm pressure transducer

• Published in: Sensors and actuators. A. Physical. Vol. 263; pp. 102 - 112
• Main Authors: Yalikun, Yaxiaer, Tanaka, Yo
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 15.08.2017; Elsevier BV
• Subjects: Acetone; All − glass transducer; Chemical cleaning; Deflection; Diaphragm (anatomy); Direct pressure measurement; Glass; High sensitive; Low-pressure measurement; Pressure measurement; Pressure transducers; Transparent transducer; Visibility; Low-pressure measurement; High sensitive; All − glass transducer; Direct pressure measurement; Transparent transducer
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2017.05.047

•Transparent all-glass diaphragm transducer for pressure measurement.•Pressure measurement in high temperature (>300°C).•High sensitive low-pressure measurement, a practical sensor sensitivity 0.0029–0.04105μm/mbar was achieved experimentally.•Directly pressure measurement of interesting point.•Potential of combined with other pressure measurement methods. This paper reports an ultra-thin glass sheet diaphragm transducer for measuring pressure. In this paper, we demonstrated the air pressure (0–800mBar) measurement at room temperature and at high temperature (>300°C). The proposed pressure transducer is suited for applications requiring a small size (<1mm2), visibility of the measuring area and both chemical and physical stabilities. The prototype ultra-thin glass sheet (UTGS) integrated all-glass transducer was made by sandwiching a 4 or 6μm thick UTGS between a glass slide with an orifice and a glass slide with a channel. When applying pressure on the inlet of the channel, the UTGS at the orifice was deflected, and the deflection was measured through a video captured by a CCD mounted level difference measurement microscope. The maximum UTGS deflection was approximately 10.53μm, and the response was at least faster than 10Hz at an air pressure condition of 800mbar. A practical sensitivity in the range of 0.0029–0.04105μm/mbar was achieved experimentally, and that makes this transducer suitable for highly sensitive, low-pressure measurement. The pressure measurement function of our transducer was confirmed at 301°C, and after a chemical cleaning process using acetone and piranha solution, the transducer appeared to have no obvious damage. The proposed transducer offers a new method for on-chip air and liquid pressure measurement during direct observation of the measurement point.