Fabrication of patterned Ba0.71Sr0.29TiO3 thick film on Si substrate by tape casting method

• Published in: Journal of the European Ceramic Society Vol. 26; no. 13; pp. 2793 - 2798
• Main Authors: Zhang, Wuxing, Xue, Lihong, Zhou, Xuecheng, Sun, Debao, Yin, Sheng
• Format: Journal Article
• Language: English
• Published: Oxford Elsevier 2006
• Subjects: Applied sciences; Building materials. Ceramics. Glasses; Ceramic industries; Chemical industry and chemicals; Electrotechnical and electronic ceramics; Exact sciences and technology; Technical ceramics; Scanning electron microscopy; Patterning; Electrical properties; Films; Film; Dielectric properties; Barium titanates; BaTiO3 and titanates; Experimental study; X ray diffraction; Oxide ceramics; Transmission electron microscopy; Thick film; Tape casting; Strontium titanates; (Ba,Sr)TiO3; Manufacturing; Powders-chemical preparation; Barium Strontium Titanates Mixed; Electroceramics
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/j.jeurceramsoc.2005.07.052

Patterned barium strontium titanate (BST) thick films were fabricated in a grooved silicon substrate using tape casting and sintered from 800 to 1250 C for 2 h. The slurry used for the tape casting was from sol-precipitation method, and the crystallisation of the as precipitated BST powders was improved by hydrothermal treatment at 200 C for 5 h. The patterned BST thick films have a size of 800 x 300 micron and homogeneous thickness of 30 micron. After sintering below 1000 C, the obtained BST thick films had a dielectric abnormality at about 30 C and the dielectric loss was about 0.02. 10 refs.