High temperature characterization of PZT(0.52 0.48) thin-film pressure sensors

• Published in: Journal of micromechanics and microengineering Vol. 24; no. 1; pp. 15017 - 12
• Main Authors: Asadnia, M, Kottapalli, A G P, Miao, J M, Randles, A B, Sabbagh, A, Kropelnicki, P, Tsai, J M
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.01.2014; Institute of Physics
• Subjects: Diaphragms; Exact sciences and technology; General equipment and techniques; high pressure sensing; high temperature sensing; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lattice parameters; Lead zirconate titanates; Micromechanics; Physics; piezoelectric pressure sensor; Pressure sensors; PZT characterizations in harsh environment; Resonant frequencies; Sensors; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Silicones; Thin films; Pressure sensors; Fluctuations; Pressure effects; Phase transformations; High temperature; PZT; Real time; High pressure; Vibrations; Thin film devices; Temperature effects; Resonance frequency; Shear stress; Bending; Diaphragm; Buckling; Microsensors; Thermal stresses
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/24/1/015017

This paper reports the characterization and real-time testing of thin-film Pb(Zr0.52Ti0.48) (PZT) micro diaphragm pressure sensor at high temperature (up to 390 °C) and high pressure (up to 105 kPa) conditions. Firstly, the influence of thermal stress on micro diaphragm deformation is investigated theoretically and experimentally. Secondly, the effect of rhombohedral-tetragonal, tetragonal-cubic phase transitions and lattice parameter changes of the PZT composite on the resonance frequency are studied. Thirdly, a good performance of the proposed sensor at low-frequency oscillatory flow generated by a vibrating sphere source (frequency of 35 Hz) in silicone oil bath at different temperatures is reported. The observations lead to the conclusion that despite the fluctuations on resonant frequency with increasing temperature, the proposed PZT sensor can be effectively used in high temperature pressure applications.