Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near-infrared scanning near-field optical microscopy (NIR-SNOM)
We present aperture probes based on non‐contact silicon atomic force microscopy (AFM) cantilevers for simultaneous AFM and near‐infrared scanning near‐field optical microscopy (SNOM). For use in high‐resolution near‐field optical microscopy, conventional AFM cantilevers are modified by covering thei...
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Published in | Surface and interface analysis Vol. 27; no. 5-6; pp. 486 - 490 |
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Main Authors | , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Chichester, UK
John Wiley & Sons, Ltd
01.05.1999
Wiley |
Subjects | |
Online Access | Get full text |
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Summary: | We present aperture probes based on non‐contact silicon
atomic force microscopy (AFM) cantilevers for simultaneous
AFM and near‐infrared scanning near‐field optical
microscopy (SNOM). For use in high‐resolution
near‐field optical microscopy, conventional AFM cantilevers
are modified by covering their tip side with an aluminium layer to
obtain an opaque coating. To fabricate an aperture, this metal layer
is opened at the very end of the polyhedral probe using focused ion
beams, thus allowing apertures of <200 nm in diameter to be
created. We describe our concept and investigate the characteristics
of these probes by discussing images in transmission and
cross‐polarized internal reflection mode. Apart from probe
characterization, our attention is devoted to the dependence of both
signal amplitude and resolution on the tip‐to‐sample
distance and to the polarization effects observed in the course of
these investigations. To exclude artefacts induced by distance
control, the measurements analysed here are performed in
constant‐height mode. Copyright © 1999 John Wiley &
Sons, Ltd. |
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Bibliography: | ark:/67375/WNG-FD28TXFC-M ArticleID:SIA498 istex:8800C6C7326F51F6B1E9BE533E655C0297BB1964 German Ministry of Education and Research - No. BMBF grant 13N7207 |
ISSN: | 0142-2421 1096-9918 |
DOI: | 10.1002/(SICI)1096-9918(199905/06)27:5/6<486::AID-SIA498>3.0.CO;2-6 |