Oxide-confined VCSELs fabricated with a simple self-aligned process flow

We propose a simplified and easier fabrication process flow for the manufacturing of AlOx-confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithogr...

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Bibliographic Details
Published inSemiconductor science and technology Vol. 32; no. 12; pp. 125004 - 125007
Main Authors Marigo-Lombart, L, Calvez, S, Arnoult, A, Thienpont, H, Panajotov, K, Almuneau, G
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.2017
Subjects
Engineering Sciences
Optics
oxidation
Photonic
self-aligned
VCSEL
Self-aligned
oxidation
VCSEL
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Summary:We propose a simplified and easier fabrication process flow for the manufacturing of AlOx-confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithography step. The electro-optical confinement achieved by standard lateral oxidation enables a low threshold and a single mode behavior for the VCSEL. This simplified process can largely improve VCSEL manufacturing by reducing the processing time and costs compared to the standard VCSEL process.
Bibliography:SST-104093.R1
ISSN:0268-1242
1361-6641
DOI:10.1088/1361-6641/aa90ae