A nanofluidic channel with embedded transverse nanoelectrodes
In this paper, we demonstrate fabrication and characterization of a nanofluidic channel with embedded transverse nanoelectrodes using a combination of conventional photolithography and focused ion beam technologies. Glass-capped silicon dioxide nanochannels having 20 nm depth, 50 nm width, and 2 mic...
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Published in | Nanotechnology Vol. 20; no. 10; p. 105302 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
England
IOP Publishing
11.03.2009
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, we demonstrate fabrication and characterization of a nanofluidic channel with embedded transverse nanoelectrodes using a combination of conventional photolithography and focused ion beam technologies. Glass-capped silicon dioxide nanochannels having 20 nm depth, 50 nm width, and 2 microm length with embedded platinum nanoelectrodes were fabricated. Channel patency was verified through measurements of the resistivity in phosphate buffered saline and electrostatic action on charged fluorescent nanospheres. Platinum nanoelectrode functionality was also tested using transverse resistance measurements in nanochannels filled with air, deionized water, and saline solution. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0957-4484 1361-6528 |
DOI: | 10.1088/0957-4484/20/10/105302 |