Rapid in-process measurement of surface roughness using adaptive optics
We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the p...
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| Published in | Optics letters Vol. 37; no. 5; p. 848 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
United States
01.03.2012
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| Online Access | Get more information |
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| Summary: | We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ. |
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| ISSN: | 1539-4794 |
| DOI: | 10.1364/ol.37.000848 |