Multistability of the Vibrating System of a Micro Resonator

Multiple attractors and their fractal basins of attraction can lead to the loss of global stability and integrity of Micro Electro Mechanical Systems (MEMS). In this paper, multistability of a class of electrostatic bilateral capacitive micro-resonator is researched in detail. First, the dynamical m...

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Bibliographic Details
Published inFractal and fractional Vol. 6; no. 3; p. 141
Main Authors Zhu, Yijun, Shang, Huilin
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.03.2022
Subjects
Attraction
Attractors (mathematics)
Basins
chaos
Dimensionless numbers
Dynamic models
Electric potential
Electrodes
Equilibrium
fractal
Fractals
hidden attractor
micro resonator
Microelectromechanical systems
multistability
Neighborhoods
Orbits
Resonators
safe jump
Voltage
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Summary:Multiple attractors and their fractal basins of attraction can lead to the loss of global stability and integrity of Micro Electro Mechanical Systems (MEMS). In this paper, multistability of a class of electrostatic bilateral capacitive micro-resonator is researched in detail. First, the dynamical model is established and made dimensionless. Second, via the perturbating method and the numerical description of basins of attraction, the multiple periodic motions under primary resonance are discussed. It is found that the variation of AC voltage can induce safe jump of the micro resonator. In addition, with the increase of the amplitude of AC voltage, hidden attractors and chaos appear. The results may have some potential value in the design of MEMS devices.
ISSN:2504-3110
2504-3110
DOI:10.3390/fractalfract6030141