Fabrication of periodic submicron dot structures of N-InP by laser-induced surface electromagnetic wave etching

• Published in: Japanese Journal of Applied Physics Vol. 31; no. 7B; pp. L928 - L930
• Main Authors: KUMAGAI, H, EZAKI, M, TOYODA, K, OBARA, M
• Format: Journal Article
• Language: English
• Published: Tokyo Japanese journal of applied physics 1992
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Microelectronic fabrication; Engraving; Indium Phosphides; Laser; Dot; Holographic grating; Surface wave; Electromagnetic wave; Periodic structure

Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2 µm. Periods along two perpendicular axes were 0.38 µm and 0.57 µm, resp...