Fabrication of periodic submicron dot structures of N-InP by laser-induced surface electromagnetic wave etching

Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2 µm. Periods along two perpendicular axes were 0.38 µm and 0.57 µm, resp...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 31; no. 7B; pp. L928 - L930
Main Authors KUMAGAI, H, EZAKI, M, TOYODA, K, OBARA, M
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 1992
Subjects
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Microelectronic fabrication
Engraving
Indium Phosphides
Laser
Dot
Holographic grating
Surface wave
Electromagnetic wave
Periodic structure
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Summary:Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2 µm. Periods along two perpendicular axes were 0.38 µm and 0.57 µm, respectively. The periods were nearly in agreement with the calculation.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.31.l928