Aluminum-line cutting end-monitor utilizing scanning-ion-microscope voltage-contrast images

A focused-ion-beam has been preliminarily applied for aluminum-line cutting. It was found that a voltage-contrast in scanning-ion-microscope images is very useful for end-monitoring of cutting.

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 24; no. 2; pp. L133 - L134
Main Authors ISHITANI, T, KAWANAMI, Y, TODOKORO, H
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 01.02.1985
Subjects
Applications
Applied sciences
Cross-disciplinary physics: materials science; rheology
Engineering techniques in metallurgy. Applications. Other aspects
Exact sciences and technology
Materials science
Metals, semimetals and alloys
Metals. Metallurgy
Others aspects
Physics
Specific materials
Electronic equipment
Scanning microscope
VLSI circuit
Fine blanking
Ion microscopy
Contrast
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Summary:A focused-ion-beam has been preliminarily applied for aluminum-line cutting. It was found that a voltage-contrast in scanning-ion-microscope images is very useful for end-monitoring of cutting.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.24.l133