A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

A new method, which is easily scalable to large scale production, has been developed to obtain gas sensor devices based on zinc oxide (ZnO) nanostructures with a 'tetrapod' shape. The method can be easily extended to other kinds of nanostructures and is based on the deposition of ZnO nanos...

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Bibliographic Details
Published inNanotechnology Vol. 27; no. 38; pp. 385503 - 385509
Main Authors Marasso, S L, Tommasi, A, Perrone, D, Cocuzza, M, Mosca, R, Villani, M, Zappettini, A, Calestani, D
Format Journal Article
LanguageEnglish
Published England IOP Publishing 23.09.2016
Subjects
gas sensor
large-scale
MEMS micro-hotplate
PDMS mask
tetrapods
top-down integration method
ZnO nanostructures
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Summary:A new method, which is easily scalable to large scale production, has been developed to obtain gas sensor devices based on zinc oxide (ZnO) nanostructures with a 'tetrapod' shape. The method can be easily extended to other kinds of nanostructures and is based on the deposition of ZnO nanostructures through polymeric masks by centrifugation, directly onto properly designed MEMS micro-hotplates. The micromachined devices, after the mask is peeled off, are ready for electrical bonding and sensing test. Sensor response has been successfully measured for some gases and volatile organic compounds with different chemical properties (ethanol, methane, nitrogen dioxide, hydrogen sulfide).
Bibliography:NANO-110687.R1
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/27/38/385503