Batch fabricated thin-film electrodes for stimulation of the central auditory system

Silicon micromachining and thin-film technology were used to fabricate iridium stimulating arrays which can be used to excite discrete volumes of the central nervous system. Silicon multichannel probes with thicknesses ranging from 1 to 40 mu m and arbitrary two-dimensional shape can be fabricated u...

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Bibliographic Details
Published inIEEE transactions on biomedical engineering Vol. 36; no. 7; pp. 693 - 704
Main Authors Anderson, D.J., Najafi, K., Tanghe, S.J., Evans, D.A., Levy, K.L., Hetke, J.F., Xue, X., Zappia, J.J., Wise, K.D.
Format Journal Article
LanguageEnglish
Published New York, NY IEEE 01.07.1989
Institute of Electrical and Electronics Engineers
Subjects
Animals
Auditory Pathways - physiology
Auditory system
Biological and medical sciences
Central nervous system
Circuit testing
Electric Stimulation - instrumentation
Electrodes
Equipment Design
Guinea Pigs
Iridium
Materials Testing
Medical sciences
Microelectrodes
Micromachining
Probes
Radiotherapy. Instrumental treatment. Physiotherapy. Reeducation. Rehabilitation, orthophony, crenotherapy. Diet therapy and various other treatments (general aspects)
Semiconductor thin films
Silicon
Technology. Biomaterials. Equipments. Material. Instrumentation
Thin film circuits
Transistors
Performance evaluation
Rodentia
Central nervous system
Electric
Instrumentation therapy
Instrumentation
Stimulation
Nervous system
In vitro
Design
Electrodes
In vivo
Vertebrata
Mammalia
Guinea pig
Animal
Thin layer electrode
ENT disease
Auditory pathway
Manufacturing
Iridium
Multielectrode device
Biomedical engineering
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Summary:Silicon micromachining and thin-film technology were used to fabricate iridium stimulating arrays which can be used to excite discrete volumes of the central nervous system. Silicon multichannel probes with thicknesses ranging from 1 to 40 mu m and arbitrary two-dimensional shape can be fabricated using a high-yield, circuit-compatible process. Iridium stimulating sites are shown to have similar characteristics to iridium wire electrodes. Accelerated pulse testing with over eight million 100 mu A biphasic current pulses on 8000 mu m/sup 2/ sites demonstrated the long-term stability of iridium and activated iridium sites. In vivo tests were performed in the central auditory pathways to demonstrate neural activation using the devices. These tests show a selective activation both as a function of site separation and site size.< >
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ISSN:0018-9294
1558-2531
DOI:10.1109/10.32101