Morphology of second-phase particles and pores in InP substrates and their elimination by a rapid in situ P injection before crystal growth
In this paper, indium (In)‐rich second‐phase particles are observed in InP crystals, which is induced by the loss of phosphorus (P) during polycrystalline melting. Their characterizations reveal that the size of these In‐rich particles is 200 nm–20 µm. The dislocation structure surrounding the secon...
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Published in | Physica Status Solidi. B: Basic Solid State Physics Vol. 253; no. 4; pp. 654 - 658 |
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Main Authors | , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Blackwell Publishing Ltd
01.04.2016
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, indium (In)‐rich second‐phase particles are observed in InP crystals, which is induced by the loss of phosphorus (P) during polycrystalline melting. Their characterizations reveal that the size of these In‐rich particles is 200 nm–20 µm. The dislocation structure surrounding the second‐phase particle and its formation is explained by the model of prismatic dislocation loop. The indium‐rich second‐phase particles could be eliminated under P‐rich condition by a rapid in situ P injection before crystal growth. Excessive P injection will lead to the formation of P pores with internal P deposits. The optimal injection value is given to eliminate the defects. |
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Bibliography: | ark:/67375/WNG-QW2DH9X0-C National Science Foundation of China - No. 51401186 ArticleID:PSSB201552494 Natural Science Foundation of Hebei Province - No. F2014202184 National Science and Technology Major Project of China Natural Science Foundation of Tianjin - No. 15JCZDJC37800 istex:5E289F495A7ABB4946209F7A787100D0452279FC ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0370-1972 1521-3951 |
DOI: | 10.1002/pssb.201552494 |