Further studies on the lithium phosphorus oxynitride solid electrolyte

• Published in: Materials chemistry and physics Vol. 123; no. 1; pp. 231 - 235
• Main Authors: Pichonat, Tristan, Lethien, Christophe, Tiercelin, Nicolas, Godey, Sylvie, Pichonat, Emmanuelle, Roussel, Pascal, Colmont, Marie, Rolland, Paul Alain
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.09.2010; Elsevier
• Subjects: Autonomous; Engineering Sciences; Integration; Ionic conductivity; LiPON; Lithium; Lithium-ion (Li-ion) microbattery; Materials; Microorganisms; Morphology; Oxynitrides; Phosphorus; Raman spectroscopy; Solid electrolyte; Solid electrolytes; Thin films; Integration; Raman spectroscopy; LiPON; Lithium-ion (Li-ion) microbattery; Solid electrolyte
• ISSN: 0254-0584; 1879-3312
• DOI: 10.1016/j.matchemphys.2010.04.001

First step in the way to the fabrication of an all-solid microbattery for autonomous wireless sensor node, amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering of a mixture target of P 2O 5/Li 2O in ambient nitrogen atmosphere. The morphology, composition, and ionic conductivity were characterized by scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and A.C. impedance spectroscopy. With a thickness of 1.4 μm, the obtained LiPON amorphous layer provided an ionic conductivity close to 6 × 10 −7 S cm −1 at room temperature. MicroRaman UV spectroscopy study was successfully carried out for the first time on LiPON thin films to complete the characterization and bring further information on LiPON structure.