Planarized multi-layer fabrication technology for LTS large-scale SFQ circuits
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Published in | Superconductor science & technology Vol. 16; no. 12; pp. 1483 - 1486 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.12.2003
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Online Access | Get full text |
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ISSN: | 0953-2048 1361-6668 |
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DOI: | 10.1088/0953-2048/16/12/036 |