A new broad-band method for magnetic thin-film characterization in the microwave range

• Published in: IEEE transactions on microwave theory and techniques Vol. 53; no. 4; pp. 1174 - 1180
• Main Authors: Vincent, D., Rouiller, T., Simovsky, C., Bayard, B., Noyel, G.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2005; The Institute of Electrical and Electronics Engineers, Inc. (IEEE); Institute of Electrical and Electronics Engineers
• Subjects: Anisotropic media; Chips; Circulators; ferrite thin films; ferrites; In situ measurement; Isolation technology; Isolators; Magnetic films; Magnetic materials; Magnetic permeability; Magnetic properties; Mathematical analysis; Microwave devices; microwave measurement; Microwave technology; Microwave theory and techniques; Microwaves; Passive components; permeability tensor measurement; Semiconductor device measurement; Thin films
• ISSN: 0018-9480; 1557-9670
• DOI: 10.1109/TMTT.2005.845730

A new method for magnetic thin-film characterization is presented. New microwave electronic technology challenges require integration of many passive components on chips. Among them, isolators and circulators are nonreciprocal passive devices which contain magnetic materials. The use of thin magnetic films in place of bulk materials seems to be a solution to integrate these components on chips. Hence, it is important to know the magnetic properties of thin films in the microwave range. An isolator is obtained by locating the thin magnetic film in a coplanar line; however, it is often difficult to measure the constitutive parameters of the film before the end of its production. The method described allows in situ measurement of two parameters of the film permeability tensor.