A combined etching process toward robust superhydrophobic SiC surfaces

• Published in: Nanotechnology Vol. 23; no. 25; p. 255703
• Main Authors: Liu, Yan, Lin, Wei, Lin, Ziyin, Xiu, Yonghao, Wong, C P
• Format: Journal Article
• Language: English
• Published: England IOP Publishing 29.06.2012
• Subjects: Carbon Compounds, Inorganic - chemistry; Chambers; Hot Temperature; Hydrophobic and Hydrophilic Interactions; Luminescent Agents - chemistry; Nanostructures - chemistry; Nanotechnology - methods; Platinum - chemistry; Porosity; Silicon Compounds - chemistry; Water

Large-scale porous SiC was fabricated by a combination of Pt-assisted etching and reactive ion etching. It was found that the surface roughness of combined etchings increased dramatically in comparison with metal-assisted etching or reactive ion etching only. To reduce the surface energy, the porous...