Semiconducting properties of aluminum-doped ZnO thin films grown by spray pyrolysis technique
Highly transparent and preferential c-axis oriented nanocrystalline undoped and A1 doped zinc oxide (AZO) thin films have been deposited onto amorphous glass substrate by spray pyrolysis. The XRD studies reveal that AZO with a hexagonal (wurtzite) crystal structure having (002) preferred orientation...
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Published in | Journal of semiconductors Vol. 36; no. 3; pp. 23 - 28 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Chinese Institute of Electronics
01.03.2015
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Subjects | |
Online Access | Get full text |
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Summary: | Highly transparent and preferential c-axis oriented nanocrystalline undoped and A1 doped zinc oxide (AZO) thin films have been deposited onto amorphous glass substrate by spray pyrolysis. The XRD studies reveal that AZO with a hexagonal (wurtzite) crystal structure having (002) preferred orientation is formed. The atomic force microscope (AFM) shows uniform surface topography. The optical band gap values of undoped and AZO thin films were changed from 3.34 to 3.35 eV. The band gap energy and photoluminescence are found to depend on the Al doping. Thermoelectric power measurement shows film having n-type in nature. Dielectric constant and loss (tan δ) were found to be frequency dependent. Interparticle interactions in the deposited films are studied by complex impendence spectroscopy. |
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Bibliography: | 11-5781/TN aluminum; zinc oxide; structural; morphological and dielectrical properties Highly transparent and preferential c-axis oriented nanocrystalline undoped and A1 doped zinc oxide (AZO) thin films have been deposited onto amorphous glass substrate by spray pyrolysis. The XRD studies reveal that AZO with a hexagonal (wurtzite) crystal structure having (002) preferred orientation is formed. The atomic force microscope (AFM) shows uniform surface topography. The optical band gap values of undoped and AZO thin films were changed from 3.34 to 3.35 eV. The band gap energy and photoluminescence are found to depend on the Al doping. Thermoelectric power measurement shows film having n-type in nature. Dielectric constant and loss (tan δ) were found to be frequency dependent. Interparticle interactions in the deposited films are studied by complex impendence spectroscopy. ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1674-4926 |
DOI: | 10.1088/1674-4926/36/3/033002 |