Cubic erbium trihydride thin films

• Published in: Thin solid films Vol. 520; no. 19; pp. 6145 - 6152
• Main Authors: Adams, D.P., Rodriguez, M.A., Romero, J.A., Kotula, P.G., Banks, J.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 31.07.2012; Elsevier
• Subjects: Backscattering; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition; Deposition by sputtering; Erbium; Exact sciences and technology; Ion and electron beam-assisted deposition; ion plating; Ion beam assisted deposition; Ion beam sputtering; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure; Physics; Spectrometry; Sputter deposition; Sputtering; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film; Thin film structure and morphology; Thin films; Microstructure; Sputter deposition; Thin film; Aluminium oxide; Cubic lattices; RBS; Ion beam assisted deposition method; Lattice parameters; Thin films; Hexagonal lattices; Erbium hydrides; Physical vapor deposition; Stress effects; Reactive sputtering; Silicon; Erbium; Crystal structure
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2012.06.008

High-purity, erbium hydride thin films have been deposited onto α-Al2O3 and oxidized Si by reactive sputtering methods. Rutherford backscattering spectrometry and elastic recoil detection show that films deposited at temperatures of 35, 150 and 275°C have a composition of 3H:1Er. Erbium trihydride films consist of a face-centered cubic erbium sub-lattice with a lattice parameter in the range of 5.11–5.20Å. The formation of cubic ErH3 is intriguing, because previous studies demonstrate a single trihydride phase with a hexagonal metal sub-lattice. The formation of a stable, cubic trihydride phase is attributed to a large, in-plane stress resulting from ion beam sputter deposition. ►Cubic erbium trihydride thin films produced by ion beam sputter deposition. ►Face-centered cubic metal sub-lattice verified by X-ray and electron diffraction. ►Composition evaluated using four different techniques. ►Film stress monitored during deposition. ►Formation of cubic erbium trihydride attributed to a large, in-plane film stress.