Modelling of an infrared halogen lamp in a rapid thermal system

• Published in: International journal of thermal sciences Vol. 49; no. 8; pp. 1437 - 1445
• Main Authors: Logerais, P.O., Bouteville, A.
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier Masson SAS 01.08.2010; Elsevier
• Subjects: Accuracy; Applied sciences; Banks; Electrical engineering. Electrical power engineering; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Halogens; Infrared; Infrared halogen lamp; Lamp temperature; Lamps; Mathematical models; Microelectronic fabrication (materials and surfaces technology); Miscellaneous; Modelling; Monte-Carlo method; Numerical simulation; Optical sources and standards; Optics; Physics; Rapid Thermal Processing (RTP); Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Various equipment and components; Infrared halogen lamp; Lamp temperature; Numerical simulation; Monte-Carlo method; Modelling; Rapid Thermal Processing (RTP); Dynamic characteristic; Heat equation; Lighting fitting; Digital simulation; Boundary conditions; Heat distribution; Steady state; Heat flux; Finite volume methods; Microelectronic fabrication; Three dimensional model; Monte Carlo methods; Rapid thermal processing; Ray tracing; Halogen lamp; Heat transfer
• ISSN: 1290-0729; 1778-4166
• DOI: 10.1016/j.ijthermalsci.2010.03.003

The heat flux distribution of an infrared halogen lamp in a Rapid Thermal Processing (RTP) equipment is studied. An overview of lamp modelling in RTP systems is given and for the first time, the infrared lamp bank is modelled by taking into consideration with accuracy a lamp portion in the bank environment. A three-dimensional (3D) lamp model, with a fine filament representation is largely presented. The model assumptions are in particular exposed with focusing on the thermal boundary conditions. The lamp temperature is calculated by solving the radiative heat transfer equation by means of the Monte-Carlo method for ray tracing. Numerical calculations are performed with the finite volume method. A very good agreement is found with experimental data in steady state. The heat amount provided by the lamp is also determined. As a first development, transient calculations are performed with the validated model and the dynamic behaviour of the lamp during heating process is determined with precision. Lastly, the model is discussed and further developments are proposed.