Taper-free and kinked germanium nanowires grown on silicon via purging and the two-temperature process
We investigate the growth procedures for achieving taper-free and kinked germanium nanowires epitaxially grown on silicon substrates by chemical vapor deposition. Singly and multiply kinked germanium nanowires consisting of 〈111〉 segments were formed by employing a reactant gas purging process. Unli...
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Published in | Nanotechnology Vol. 23; no. 11; pp. 115603 - 1-6 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
England
IOP Publishing
23.03.2012
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Subjects | |
Online Access | Get full text |
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Summary: | We investigate the growth procedures for achieving taper-free and kinked germanium nanowires epitaxially grown on silicon substrates by chemical vapor deposition. Singly and multiply kinked germanium nanowires consisting of 〈111〉 segments were formed by employing a reactant gas purging process. Unlike non-epitaxial kinked nanowires, a two-temperature process is necessary to maintain the taper-free nature of segments in our kinked germanium nanowires on silicon. As an application, nanobridges formed between (111) side walls of V-grooved (100) silicon substrates have been demonstrated. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 ObjectType-Article-1 ObjectType-Feature-2 |
ISSN: | 0957-4484 1361-6528 |
DOI: | 10.1088/0957-4484/23/11/115603 |