Measurement of 3D Printed Structure Using a Peak Detection Method in Dispersive Interferometry
We describe an optical three dimensional (3D) measurement method using white-light dispersive interferometry in the range of 5 μ m–150 μ m. A spectrometer was employed for real-time wavelength scanning and the distance information was obtained using a simple peak detection method in the spectral d...
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Published in | Journal of electronic materials Vol. 44; no. 3; pp. 792 - 796 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Boston
Springer US
01.03.2015
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | We describe an optical three dimensional (3D) measurement method using white-light dispersive interferometry in the range of 5
μ
m–150
μ
m. A spectrometer was employed for real-time wavelength scanning and the distance information was obtained using a simple peak detection method in the spectral domain. Fast measurement time enabled us real-time distance measurement of the specimen. The piezoelectric actuator and capacitance distance sensor was employed for nanometer positioning and measuring distance reference value. This technique can be implemented as a distance measurement unit in white-light scanning interferometry by simply attaching a spectrometer to the conventional system. The results showed an accuracy of better than 60 nm for any position within 5
μ
m–150
μ
m. The proposed technique can be used as shape-measuring tool for 3D printed products. Measurement results using the proposed method are also presented. These experimental results show that pthe roposed method can be used as a measurement tool for 3D printed products. |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/s11664-014-3524-4 |